Facilities
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Class 100 Clean Room
1500 sq. ft. clean room in a 3000 sq. ft. laboratory located in the School of Engineering.
- Newly remodeled (Summer 2006)
- Card-swipe access to authorized users only
- Equipment use coordinated by lab manager
- Authorized users have personalized accounts to equipment
Nanostructure Fabrication and Characterization Facility
Nanostructure Fabrication and Characterization Facility
This facility is a 1300 sq. ft. leased lab space located in NASA Ames Research Center, which features the following:
- Plasma-enhanced chemical vapor deposition (PECVD) system
- Magnetron sputtering system
- Scanning electron microscope (SEM) with electron beam deposition capability
- Thermal imaging system for nanoscale devices
- Thermal interface materials (TIM) resistance measurement system
- Chemical fume hood
- De-ionized water
- Compressed air and natural gas lines
Specialized Equipment
Scanning Electron Microscope
Scanning Electron Microscope
High-resolution field-emission scanning electron microscope (SEM): Hitachi S-4800
- High-resolution 1.0 nm at 10 kV / 2.0 nm at 1.0 kV
- Chemical analysis through Energy Dispersive X-ray (EDX) spectroscopy
- Scanning Transmission Electron Microscopy (STEM) for cross-sectional imaging
Electrical Measurement System
Electrical Measurement System
Water probe station (Cascade Microtech 12000 series) & Current-voltage (I-V), capacitance-voltage (C-V), and high-frequency characteristics of nanostructures
- Temperature controller (-65°C to 200°C)
- Semiconductor parameter analyzer (Agilent 4156C)
- Impedance analyzer (Agilent 4294A)
- Vector network analyzer (up to 65GHz) (Anritsu)
Atomic Force Microscope
Atomic Force Microscope
High-resolution scanning probe microscope for nanostructure surface characterization
- Noise and vibration isolation bench
Full range of SPM techniques
- Electrical characterization measurements
- Electric Force Microscopy (EFM) (tapping mode)
- Tunnel AFM (TUNA) (contact mode)
- Conductive Atomic Force Microscopy (CAFM) (contact mode)
- Scanning Spreading Resistance Microscopy (SSRM) (contact mode)
- Scanning Capacitance Microscopy (SCM) (contact)
- Multi-channel output